125. 3D NANO-FABRICATION AND LOW VOLTAGE NANO-ELECTRO-MECHANICAL SYSTEMS (NEMS)

Department: Electrical & Computer Engineering
Faculty Advisor(s): Jie Xiang | Yu-Hwa Lo | Yuan Taur | Prabhakar R. Bandaru | Renkun Chen

Primary Student
Name: Zhelin Sun
Email: z4sun@ucsd.edu
Phone: 803-553-9549
Grad Year: 2016

Abstract
Nanotechnology has seen great development in the past two decades, and numerous nano-devices with superior electrical/mechanical/optical performance have emerged in wide applications such as electronics, biomedicine, solar energy, and aerospace. Nanofabrication, and in particular 3-D nanostructure fabrication, has been intensively studied for the creation of novel devices, the scaling of existing systems, and the improvement in utilities and reliabilities. By taking advantage of the 3-D nanostructure fabrication and nanoscale electrostatic attraction, we built low voltage nano-electro-mechanical (NEM) switches with innovative grayscale electron-beam lithography. The main benefit of this new fabrication technique is that the essential air gaps for movable components (nano-cantilevers or nano-beams) can be generated in a straightforward one-step lithography process, without any growth or etching to traditional sacrificial layers such as dielectrics. The structural dimensions of the nano-switches, as well as switch-on (pull-in) voltages are both readily controllable. The fabrication and performance for both single-cantilever nano-switches and doubly-clamped NEM devices are demonstrated.

Industry Application Area(s)
Electronics/Photonics | Materials | Semiconductor

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