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Electron Beam Facility Is Open for Business

micrograph
Colorized micrograph of an electron beam-written grid pattern demonstrating < 8 nm resolution capabilities of the EBPG5200.

UC San Diego's new Vistec Lithography EBPG5200 electron beam writer is available for use by campus researchers, as well as industry and research partners. The e-beam writer, used for nano and micro-fabrication (see pg. 8), is a new addition to the Qualcomm Institute's Nano3 facility, which provides a synergistic environment for fundamental research and development efforts at the nanoscale with a focus on nanoscience, nanoengineering and nanomedicine. In addition to providing essential nanofabrication capabilities for research on electronic and photonic materials and devices, Nano3 facilitates the pursuit of research in emerging, interdisciplinary and rapidly growing fields such as biomedical and biochemical devices, monolithic and heterogeneous integrated electronic and photonic devices and circuits, and sensor technology.

Vistec Lithography EBPG5200 specifications include:

  • High-resolution gaussian beam system
  • Thermal field emission source with 50/100 kV beam energy
  • Minimum feature size < 8 nm
  • Write field size up to 1mm; stitching < 30 nm (mean + 3s)
  • Sample holders: 2", 3", 4", 8" wafers and pieces, 6" mask
  • 50 MHz pattern generator
  • Z Lift (adjustable stage height) option

Details and Availability:
Dr. Maribel Montero (858) 534-4222
Ryan Anderson (858) 822-5663
nano3ebeam@calit2.net
http://nano3.calit2.net/

The new e-beam writer enables researchers to write fine features on a scale of less than 8 nanometers, over a large surface area up to 8 inches. The challenge of writing over large fields with electron beams is that the beam of electrons can become larger and diffused, distorting the features of the pattern. However, the EBPG5200 has superior electromagnetic focusing capability for extremely narrow electron beams over 1x1 mm2 write fields and a high stitching accuracy, which allows ultrascaled features to be written not only on research scale samples but also on commercial and production size wafers.

Adding the Vistec e-beam writer to Nano3 was enabled by funding from the Major Research Instrumentation program of the National Science Foundation, with contributions from UC San Diego, the Jacobs School of Engineering, the Department of Electrical and Computer Engineering, the UC San Diego School of Medicine, and Qualcomm Institute / Nano3.

UC San Diego Division of Calit2 Named Qualcomm Institute

UC San Diego named its division of the California Institute for Telecommunications and Information Technology (Calit2) in honor of the philanthropy of the San Diego-based wireless technology leader, Qualcomm Incorporated. The multidisciplinary research center is now known as the Qualcomm Institute for Telecommunications and Information Technology, the UC San Diego Division of Calit2; or Qualcomm Institute for short.

Paul E. Jacobs
Qualcomm Chairman & CEO Dr. Paul E. Jacobs at the Qualcomm Institute open house on May 24.

The name change recognizes the critical role Qualcomm, and more recently, its affiliated Qualcomm Foundation, have played in Calit2 since the state of California created it in 2000. Gifts to Calit2, including recent grants from the Qualcomm Foundation, have pushed Qualcomm's philanthropic support for the institute to just under $26 million.

"This recognition is much deserved given the important roles that Qualcomm and the Qualcomm Foundation have played in helping us to build and cement the Institute's reputation as a world leader in technologies that benefit society," said UC San Diego Chancellor Pradeep K. Khosla.

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