36. stacked graphene/nanostructure as plasmonic metamaterials

Department: NanoEngineering
Research Institute Affiliation: Agile - CaliBaja Center for Resilient Materials & Systems
Faculty Advisor(s): Oscar Vazquez Mena

Primary Student
Name: Jiaying Wang
Email: jiw372@ucsd.edu
Phone: 858-291-2349
Grad Year: 2020

Abstract
Plasmonic crystals have been explored and proposed for the utilized as biosensor, plasmonic metamaterials and invisibility cloak. However, most of researches have been limited to surface devices due to the challenge of 3D metal structuring. Two-photon lithography allows to fabricate sub-micro regime. However, this method requires photosensitive materials and the patterning of metals or other complex materials require more complicated processing. Thus, we report here a new type of 3D layer-by-layer plasmonic crystals by assembling 2D materials and metallic structures by traditional photolithograhy and e-beam lithography. All the metallic structures have been supported by suspended graphene or SiNx thin film. The coupling between the metallic structures are controlled by the thickness of the dielectric materials. We expect to achieve high-resolution for 3D stacked structures, broad materials compatibility and high control on the interaction in the layers and develop next-generation metadevices.

Industry Application Area(s)
Electronics/Photonics | Materials | Semiconductor

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